Maximize various different semiconductor process performance by controlling the size, and concentration of slurry particles.
Improve the CMP process
Reduce manufacturing costs
Improve of production quality
The system can handle variable filtration needs (from filtration membranes) and uses rotating blades to generate vortices, which cleans the membrane during filtration. This results in a reliable and consistent output due to higher water recovery, less frequent cleanings, higher systems efficiency, and reduced downtime.
Semiconductor material slurry filtration/enrichment - Organic solvent filtration and slurry concentration
Remove TSS to recycle water
Reduce wastewater disposal cost
High recovery rate while maintaining high flux
There is high fouling potential due to the nature of the particle being small in size,and abrasive.
Model: FMX-B (membrane area: 0.015 ㎡)
Membrane: PTFE * 0.05 μm
Average Flux: 50LMH (VCF.5)
TSS Removal: 99.9%*