Infineon Technologies

Recycling Ultra Pure Water from Silicon Back Grinding Process

1. Client Goals

  • Remove TSS to recycle water 
  • Reduce wastewater disposal cost

2. Challenges

  • Small particle size, high fouling potential
  • Inorganic abrasive material 

3. Expectation on FMX

  • High recovery rate while maintaining high flux

4. Test Results Summary

  • Currently, average flux 306 LMH 
  • TSS Removal: 99.9%*
  • Recovery: 95%+** 

*Below detectable limit of EPA 160.1
**Maximum recovery achieved due to hold up volume in unit, higher recovery can be achieved with larger initial batch size

infineon graph.png
 Feed (left), permeate (middle), concentrate (right)

Feed (left), permeate (middle), concentrate (right)


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